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Walter (Walt) J. Trybula, Ph.D. An IEEE Fellow, is a Senior Fellow in the Lithography Division at International SEMATECH in Austin, TX. At SEMATECH, Dr. Trybula's current activities and interests include super high-numerical aperture (NA) immersion lithography, emerging lithography technologies, semiconductor photomask issues, business concerns, and nanotechnology development. His most recent emphasis is on nanotechnology, cleaning/contamination issues, and charged particle maskless lithography. Walt has presented the need for building the evolving nanotechnology infrastructure to the U.S. Senate Staff in June 2003, been an annual presenter at the Nano-Bio Tech Sum-mit in San Marcos, presented “Introduction to Nano Technology” courses at the 2004 ECTC and the 2004 IEMT conferences, is on the Board of the Texas State University’s Nano-materials Application Center, is active in developing the first SEMI NanoForum and Workshop, and was appointed to the Texas Governor’s Technology Task Force in 2004. He is also recognized for driving SEMATECH’s effort that enabled the semicon-ductor industry’s rapid development of immersion lithography. He received his B.S. degree in Physics from the Illinois Institute of Technology and did graduate work at the University of Pittsburgh. Walt received an MBA degree from James Madison University, and his Ph.D. degree in Information Sciences from the University of Texas at Austin. Prior to joining SEMATECH in 1993, he was President of Ivy Systems, Inc., a company working in the manufacturing automation and analysis arena. Previously, he was with the General Electric Company, where he served as a Senior Consultant on corporate staff working in manufacturing automation. Dr. Trybula is an IEEE Fellow and a Senior Member of IMAPS, a member of SPIE, a member of the American Society of Information Science (ASIS), and a member of the Association Computing Machinery (ACM). He is an elected member of the Board of Governors for the IEEE/CPMT Society and is the current Editor-in-Chief and Founding Editor, IEEE Transactions on Electronics Packaging Manufacturing (previously titled: Manufacturing). In recognition of his work, Dr. Trybula has been cited in Who’s Who in the Computer Industry, Who's Who in the South and Southwest, Who's Who in Science and Engineering, and Who’s Who in Information Science, among others. He has appeared in more than 150 publications, including papers, book chapters, encyclopedia articles, teaching modules, and published conference proceedings.
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