Alain Diebold, PhD

Dr. Diebold is a SEMATECH Senior Fellow and a Fellow of the AVS. The main focus of his activities are development of metrology technology with a focus on industry coordination. He provides technical management for metrology activities at International SEMATECH. He founded and leads the Metrology Council and Analytical Laboratory Managers Council of the International SEMATECH member companies. He is a member of the International Metrology Technical Working Group and founder and co-chair of the US Metrology Technical Working Group for the 2005 International Technology Roadmap for Semiconductors. The charter of these activities is to foster the development of metrology/analytical technology for existing manufacturing needs and for development and manufacture of future generations of integrated circuits. Dr. Diebold has edited the Handbook of Silicon Semiconductor Metrology and prepared a WEB based short course based on this book available from SEMIZONE. He is editor of the Metrology section of Future FAB International. He is chair of the Manufacturing Science and Technology Group (MSTG) of the AVS. (The AVS Science and Technology Society was previously known as the American Vacuum Society.) He has co-edited five books that are conference proceedings from “Characterization and Metrology for ULSI Technology” and its predecessor conference. Prior to joining SEMATECH, Dr. Diebold worked at Allied Signal in the areas of molecular beam epitaxy of III-V compounds and materials characterization of a broad range of semiconductor and amorphous metal products.