SOI (Silicon-on-Insulator) Devices, Technology, and Applications

Outline:

• Review of CMOS technology scaling and short-channel device operation
• SOI wafers / SOI material market
• SOI variants
• Partially-depleted SOI MOSFETs
• Fully-depleted SOI MOSFETs
• Ground-plane SOI MOSFETs
• Double-gate SOI MOSFETs